durusmail: mems-talk: spin coater vacuum path
spin coater vacuum path
2010-12-09
2010-12-09
2010-12-09
2010-12-09
2010-12-09
2010-12-10
2010-12-10
2010-12-10
2010-12-10
2010-12-09
2010-12-10
2010-12-09
2010-12-09
2010-12-10
2010-12-13
2010-12-14
spin coater vacuum path
Paul Grasso
2010-12-14
Jia,

I appreciate the conversations we have had and understand your desire to fix
your system at your facility. From everything we have discussed over the past 3
days, you have properly inspected all the potential issues causing your low
vacuum. From what you have told me you have properly disassembled and
reassembled the vacuum valve, which showed no signs of contamination.
You have stated that you do have proper vacuum and CDA source requirements and
yet the vacuum present is still only 6-7"Hg.

It is imperative to remember to not try to clean the shaft area with forced air.
This is a mistake that users of our equipment will try to resolve a small
problem, making it a larger one by causing damage to the vacuum sensor.  From
all of our discussions, it is clear that your vacuum sensor has been damaged in
some way.

I understand your desire to exhaust all possibilities before sending us the
system, but from my experience, there are no other options at this point.

The positive side of all this is that we will give the system a complete
evaluation and find the exact cause for  the problem and do so in a  very quick
period of time.

Normally, we can repair the system within 24 hours after we receive it.
Although forums such as this can be informative and helpful, there are times
when improper guidance can lead to more severe damage of the system.

Duane High, Production Manager
Laurell Technologies Corporation

Paul A. Grasso
Process Engineer
Laurell Technologies Corporation


reply