Jia, Be sure to check the vacuum chuck to part o-ring as well. It's a simple problem that's easy to overlook. You could always write Laurell (www.laurell.com) and see what they have to say, they've been quite helpful for us in the past. David A. Grove Luxel Corp. www.luxel.com -----Original Message----- From: mems-talk-bounces+david.grove=luxel.com@memsnet.org [mailto:mems-talk-bounces+david.grove=luxel.com@memsnet.org] On Behalf Of Jia Yao Sent: Wednesday, December 08, 2010 4:33 PM To: General MEMS discussion Subject: [mems-talk] spin coater vacuum path Hi all, I am having problem with spin coater. At first there were some photoresist going into the chuck all the way to the bottom so the program stopped automatically after a couple of seconds of running. Also the platform was very hard to rotate by hand. After I cleaned the pathway which has the photoresist, the platform moves freely but the vaccum is showing insufficient value. Is there something blocking the vacuum somewhere? How could I possibly check the block? Thank you very much! Jia