Thanks Huy, I felt vacuum at multiple points you mentioned. They seem to have weaker vacuum than before. The shaft is clear though. On Fri, Dec 10, 2010 at 4:24 PM, Huywrote: > Put some grease onto the back of the adaptor that is used to spin smaller > substrate then put the adaptor onto the substrate holder, place the wafer ontop > of the adaptor then turn on the vacuum to see if you can defeat the vacuum > interlock. If adaptor is not exist, remove the substrate holder to the point > that you can put your thumb onto shaft that connecting the substrate holder and > the vacuum inlet then turn on the vacuum button (there's an elbow joint @ the > bottom of the shaft that the substrate holder's connected to, this is where the > resist tend to accumulate) ..... remove the vacuum line, fill the shaft with > liquid, if liquid comes out of the vacuum inlet then you got no blockage. > > huy