Jia, while I am not familiar with the Laurel spinner I am familiar with spinners in general, we make them. There will be a seal somewhere and that seal will of needs be a rotary seal and subject to wear. Find that seal and make sure it is not leaking. If it is re-place it. If it is not then there might be a leak elsewhere but the most likely leak point is at the rotary seal. Gary S-Cubed PO Box 365 9 Mars Ct. Montville, NJ 07039 phone 973-263-0640 ex 35 fax 973-263-8888 -----Original Message----- From: mems-talk-bounces+garyh=s-cubed.com@memsnet.org [mailto:mems-talk-bounces+garyh=s-cubed.com@memsnet.org]On Behalf Of Jia Yao Sent: Thursday, December 09, 2010 10:17 PM To: General MEMS discussion Subject: Re: [mems-talk] spin coater vacuum path I took the parts out in the pathway and cleaned them so it is less likely that there is some blockage than leakage. Any good way to check the leakage? And I confirmed that the external vacuum pump and the vacuum sensor on the spin coater are all right. Thank you. Jia