Hi,

Did you make sure to replace any "O"-Rings or gaskets. Cleaning them is
tough it is better to replace them.

Rick Morrison


-----Original Message-----
From: mems-talk-bounces+rmorrison=draper.com@memsnet.org
[mailto:mems-talk-bounces+rmorrison=draper.com@memsnet.org] On Behalf Of
Jia Yao
Sent: Thursday, December 09, 2010 10:17 PM
To: General MEMS discussion
Subject: Re: [mems-talk] spin coater vacuum path

I took the parts out in the pathway and cleaned them so it is less
likely
that there is some blockage than leakage. Any good way to check the
leakage?
And I confirmed that the external vacuum pump and the vacuum sensor on
the
spin coater are all right.

Thank you.
Jia