durusmail: mems-talk: Adhesion problem during 7740 glass wafer wet etching process
Adhesion problem during 7740 glass wafer wet etching process
2010-12-13
2010-12-13
2010-12-13
2010-12-14
2010-12-13
2010-12-13
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2010-12-14
2010-12-15
2010-12-14
2010-12-16
2010-12-15
Adhesion problem during 7740 glass wafer wet etching process
Xin Yan
2010-12-14
Thanks Shay, i'll try it later.

On Mon, Dec 13, 2010 at 10:28 PM, Shay Kaplan  wrote:

> Try evaporate CrAU or magnetron sputtered CrAu. With 48% HF

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Yan Xin
-Pen-Tung Sah MEMS Research Center,
-Xiamen University, CHINA
XMU HOME:
http://memsc.xmu.edu.cn/mems_renchaiduiwu/XuYuan_Chen-Group/index_1.html
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