Hi Mehmet,

Yes, try with Piranha clean, serveral times if it's necessary.

Best,

Dante Mercado

El 2017-04-20 01:10, Sangwook Chu escribió:
> Hi Mehmet,
>
> Can you try Piranha clean? I am not sure what materials you have on
> your
> chip but it should work great for removing organic residues.
>
> Best,
> Sangwook
>
> On Wed, Apr 19, 2017 at 11:33 PM Mehmet Yilmaz
> 
> wrote:
>
>> Dear mems-talk community,
>> I am using "DENKA T-80HW-23A" dicing saw tape to dice MEMS chips
>> from full
>> 4" silicon wafers.
>>
>> My integration process does not allow me to mechanically peel the
>> diced
>> tape from the diced MEMS chips. So, I tried acetone to remove the
>> dicing
>> saw tape (DENKA T-80HW-23A) pieces from the silicon surface of the
>> MEMS
>> chips. The pieces of dicing tape are removed from the MEMS chips,
>> however,
>> I realized that, there are very thin layers of residues left on the
>> silicon
>> surface of the MEMS chips that I cannot remove with acetone.
>>
>> After drying the MEMS chips with nitrogen blowing, I tried O2 plasma
>> clean
>> to remove the remaining residues. Most of the residues are gone, but
>> there
>> are still some residues left that I need to remove.
>>
>> Could you please let me know how to remove these thin residues of
>> the
>> dicing saw tape (DENKA T-80HW-23A) from silicon surface?
>>
>> Thanks in advance,
>> Sincerely,
>>
>> Mehmet
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> --
> Sangwook Chu
>
> Ph.D Student
> MEMS Sensors and Actuators Laboratory
> Department of Electrical and Computer Engineering
> University of Maryland
> College Park, MD, USA
> Tel: +1-301-405-1897
> Cel: +1-301-332-9260
> Email: swchu@umd.edu 
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
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_______________________________________________
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provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

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