Dear Mehmet, I would recommend the usage of a non-polar solvent like petrol ether or cyclohexane. Regards, André -----Ursprüngliche Nachricht----- Von: Mehmet Yilmaz [mailto:mehmetyilmaztr@gmail.com] Gesendet: Mittwoch, 22. März 2017 13:47 An: General MEMS discussion Betreff: Re: [mems-talk] Removal of dicing tape (DENKA T-80HW-23A) residues from silicon surface of MEMS chips Dear mems-talk community, I just wanted to let you know that Piranha cleaning worked fine. Dicing saw tape residues are completely removed from one of my trial MEMS chips. I you have some other suggestions that does not require Piranha clean, please let me know your suggestions. I would be really interested in trying a residue removal technique that does not require Piranha cleaning. Thanks in advance, Sincerely, Mehmet On Tue, Mar 21, 2017 at 9:56 PM, Mehmet Yilmazwrote: > Dear mems-talk community, > I am using "DENKA T-80HW-23A" dicing saw tape to dice MEMS chips from > full 4" silicon wafers. > > My integration process does not allow me to mechanically peel the > diced tape from the diced MEMS chips. So, I tried acetone to remove > the dicing saw tape (DENKA T-80HW-23A) pieces from the silicon surface > of the MEMS chips. The pieces of dicing tape are removed from the MEMS > chips, however, I realized that, there are very thin layers of > residues left on the silicon surface of the MEMS chips that I cannot remove with acetone. > > After drying the MEMS chips with nitrogen blowing, I tried O2 plasma > clean to remove the remaining residues. Most of the residues are gone, > but there are still some residues left that I need to remove. > > Could you please let me know how to remove these thin residues of the > dicing saw tape (DENKA T-80HW-23A) from silicon surface? > > Thanks in advance, > Sincerely, > > Mehmet > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk