Dear mems-talk community,
Thanks for your very valuable ideas! I really appreciate all of your ideas.
Sincerely,
Mehmet
On Wed, May 3, 2017 at 2:01 AM, April Maria Lujan <
jade.knightstar7mar@gmail.com> wrote:
> Hi Mehmet,
>
> IPA works well to remove adhesive redsidue, you should try that and finish
> with an 180 second O2 clean.
>
> There's 91% IPA that is sold at local drug stores and the 99% IPA which is
> used by industry which should work well.
>
> Other that acetone is not very great. Try IPA...
>
> Best regards,
>
> April Lujan
>
> Manufacturing Technician
>
> On Fri, Apr 21, 2017 at 8:37 AM, mercado wrote:
>
> > Hi Mehmet,
> >
> > Yes, try with Piranha clean, serveral times if it's necessary.
> >
> > Best,
> >
> > Dante Mercado
> >
> > El 2017-04-20 01:10, Sangwook Chu escribió:
> >
> >> Hi Mehmet,
> >>
> >> Can you try Piranha clean? I am not sure what materials you have on your
> >> chip but it should work great for removing organic residues.
> >>
> >> Best,
> >> Sangwook
> >>
> >> On Wed, Apr 19, 2017 at 11:33 PM Mehmet Yilmaz <
> mehmetyilmaztr@gmail.com>
> >> wrote:
> >>
> >> Dear mems-talk community,
> >>> I am using "DENKA T-80HW-23A" dicing saw tape to dice MEMS chips from
> >>> full
> >>> 4" silicon wafers.
> >>>
> >>> My integration process does not allow me to mechanically peel the diced
> >>> tape from the diced MEMS chips. So, I tried acetone to remove the
> dicing
> >>> saw tape (DENKA T-80HW-23A) pieces from the silicon surface of the MEMS
> >>> chips. The pieces of dicing tape are removed from the MEMS chips,
> >>> however,
> >>> I realized that, there are very thin layers of residues left on the
> >>> silicon
> >>> surface of the MEMS chips that I cannot remove with acetone.
> >>>
> >>> After drying the MEMS chips with nitrogen blowing, I tried O2 plasma
> >>> clean
> >>> to remove the remaining residues. Most of the residues are gone, but
> >>> there
> >>> are still some residues left that I need to remove.
> >>>
> >>> Could you please let me know how to remove these thin residues of the
> >>> dicing saw tape (DENKA T-80HW-23A) from silicon surface?
> >>>
> >>> Thanks in advance,
> >>> Sincerely,
> >>>
> >>> Mehmet
> >>> _______________________________________________
> >>> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> >>> provider of MEMS and Nanotechnology design and fabrication services.
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> >>>
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> >>>
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> >>>
> >>> --
> >> Sangwook Chu
> >>
> >> Ph.D Student
> >> MEMS Sensors and Actuators Laboratory
> >> Department of Electrical and Computer Engineering
> >> University of Maryland
> >> College Park, MD, USA
> >> Tel: +1-301-405-1897
> >> Cel: +1-301-332-9260
> >> Email: swchu@umd.edu
> >> _______________________________________________
> >> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> >> provider of MEMS and Nanotechnology design and fabrication services.
> >> Visit us at http://www.mems-exchange.org
> >>
> >> Want to advertise to this community? See http://www.memsnet.org
> >>
> >> To unsubscribe:
> >> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> >>
> > _______________________________________________
> > Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> > provider of MEMS and Nanotechnology design and fabrication services.
> > Visit us at http://www.mems-exchange.org
> >
> > Want to advertise to this community? See http://www.memsnet.org
> >
> > To unsubscribe:
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> >
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community? See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk