I can recount a problem I had with PR adhesion in the 70's when I developed batch vacuum vapor prime. My worst layer was 17.000 Angstroms of thermal silicon dioxide which I etched in buffered HF for 17 minutes. If I had a problem with resist adhesion it occurred on this layer. When I developed the original YES vacuum vapor primer I tested it with this layer. I ran 35 wafers through a vacuum vapor prime. Then waited 24 hours with the wafers in the open, and coated 5 wafers, 24 hours later 5 more wafers. Finally after 1 week the last 5 wafers. Coated them together, exposed, developed and baked and etched for 17 minutes. Did not have a single problem with the week old wafers. If you can get access to a YES vacuum vapor prime try it. As it is Aluminum run the prime time for 20 minutes Aluminum needs 4 time the exposure to the HMDS. If you cannot get access contact me and I will run free tests for you. Do not worry the resist will still stick after mailing. Bill Moffat CEO YES. -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems- talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Maksym Plakhotnyuk Sent: Wednesday, June 08, 2016 10:44 AM To: mems-talk@memsnet.org Subject: [mems-talk] AZ5214E photoresist adhesion problem on Al2O3 coated Si wafers Hi All I face a problem of keeping AZ5214e photoresist on top of Al2O3 film during BHF etch. I have done post bake of PR at 150C for 30 min however it still does not help. Does any of you know the solution or any idea how to keep PR On top of alumina during BHF etch? Thank you in advance Best regards Maksym Plakhotnyuk PHD student at DTU _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk