Hello all, I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if someone has used thermal vacuum grease for this purpose that can be removed easily at the end. The silicon wafer is patterned with photoresist and has no other material on it. Thanks Shree _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk