I took a closer look at our Bosch SOP and realized that Santovac 5 is only
recommended for mounting pieces to a carrier wafer - for mounting full
wafers we use photoresist.  Our etcher physically clamps the wafer and so
clamping a full wafer on top of a carrier wafer could cause Santovac 5 to
squirt out from between the wafers, hence the baked photoresist.  However,
you should be able to etch as deep as you like as long as the layer of
Santovac 5 is thin enough to provide good thermal contact between carrier
and workpiece.  Thermal grease may not be a good idea because it may
produce undesirable by-products if exposed to the plasma.

--
Brian C. Stahl
Graduate Student Researcher
UCSB Materials Research Laboratory
brian.stahl@gmail.com / bstahl@mrl.ucsb.edu
Cell: (805) 748-5839
Office: MRL 3117A



On Tue, Dec 11, 2012 at 3:52 PM, Shree Narayanan  wrote:

> Dear Mr. Strahl,
>
> Could you please tell me if this has been used to etch down to 200-300u? I
> attempted thermal grease and it didnt help much. Especially with local
> heating effects I lost most devices with photoresist getting etched away
> quickly, in those locations.
>
> Shree
>
>
> On Fri, Dec 7, 2012 at 1:43 PM, Brian Stahl  wrote:
>
> > In the nanofab at UCSB we use Santovac 5 diffusion pump oil to attach
> > pieces to carrier wafers. I've personally used it for ICP-RIE (but it is
> > also in the SOP for our Bosch process etcher) and it works well and is
> easy
> > to clean up. Only the tiniest amount is required.
> >
> > Best regards,
> >
> > Brian Stahl
> >
> > --
> > Sent from a mobile device.
> > On Dec 5, 2012 11:13 AM, "Shree Narayanan"  wrote:
> >
> > > Hello all,
> > >
> > > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> > > order to etch it in a Alcatel deep-reactive ion etcher. I am wondering
> if
> > > someone has used thermal vacuum grease for this purpose that can be
> > removed
> > > easily at the end. The silicon wafer is patterned with photoresist and
> > has
> > > no other material on it.
> > >
> > > Thanks
> > > Shree
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