Hi, Shree, Why not just use the photoresist? It works well for me. Best regards, Fei 2012/12/5 Shree Narayanan: > Hello all, > > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in > order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if > someone has used thermal vacuum grease for this purpose that can be removed > easily at the end. The silicon wafer is patterned with photoresist and has > no other material on it. > > Thanks > Shree > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk -- Best regards, Yours sincerely Fei Wang ______________ Assistant Professor, Dr MIC - Department of Micro and Nanotechnology Technical University of Denmark (DTU) Building 344, 1st floor, Room no. 130 DK-2800, Kgs. Lyngby Denmark Tel: +45 4525 6311 Fax: +45 4588 7762 Email: fei.wang@nanotech.dtu.dk http://www.nanotech.dtu.dk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk