Mr. Morrison, Can you please tell me if the etch you attempted was 200um deep? I am attempting 200u+ deep etches. I tried to use thermal grease but, it left me with local heating effects that caused resist to be eaten away completely in those areas. Does resist offer a better thermal conductivity? Shree On Wed, Dec 5, 2012 at 2:19 PM, Morrison, Richard H., Jr. < rmorrison@draper.com> wrote: > I use a layer of resist painted onto the carrier wafer that is vacuum > out-gassed before it goes in to the etcher. If you have open cavities on > the backside of the wafer you are etching then just leave vent holes in the > resist to avoid trapped air. Grease is a bad idea to hard to cleanup. > > Rick > > > -----Original Message----- > From: mems-talk-bounces+rmorrison=draper.com@memsnet.org [mailto: > mems-talk-bounces+rmorrison=draper.com@memsnet.org] On Behalf Of Shree > Narayanan > Sent: Wednesday, December 05, 2012 10:36 AM > To: General MEMS discussion > Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching > > Hello all, > > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in > order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if > someone has used thermal vacuum grease for this purpose that can be removed > easily at the end. The silicon wafer is patterned with photoresist and has > no other material on it. > > Thanks > Shree > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk