Good morning Shree, There are few methods of temporarily mounting one wafer to a carrier wafer: 1. Thermal release tape - Haeun Chemtec Rexpan or Nitto Denko Revalpha 2. Thermalplastic adhesive - Brewer Science WaferBond HT10.10, HD Microsystems HD-3007, or ShinEtsu 3. Wax - CrystalBond What temperature and duration does the temporarily bonded wafer pair is exposed to during DRIE? With these two parameters, you could narrow down material selection and corresponding method. If you like we do have application lab in Tempe, AZ can do this for you. My contact information is below, please let me know if you need further assistance. Best Regards, Tian Tang EV Group invent * innovate * implement Applications Engineer - Direct: +1 (480) 305 2455, Main: +1 (480) 305 2400 Fax: +1 (480) 305 2401 Cell: +1 (480) 274 3892 E-Mail: T.Tang@EVGroup.com Web: www.EVGroup.com This message and any attachments contain confidential or privileged information, which is intended for the named addressee(s) only. If you have received it in error, please notify the sender immediately and then delete this e-mail. Please note that unauthorized review, copying, disclosing, distributing or otherwise making use of the information is strictly prohibited. Save paper and trees! Please consider the environment before printing this e-mail. -----Original Message----- From: Shree Narayanan [mailto:snsnair@vt.edu] Sent: Wednesday, December 05, 2012 8:36 AM To: General MEMS discussion Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching Hello all, I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if someone has used thermal vacuum grease for this purpose that can be removed easily at the end. The silicon wafer is patterned with photoresist and has no other material on it. Thanks Shree _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk