durusmail: mems-talk: Adhesive to bond onto a carrier wafer for etching
Adhesive to bond onto a carrier wafer for etching
2012-12-05
Shree Narayanan
2012-12-05
Tinka Li
2012-12-06
Michael Martin
2012-12-12
Shree Narayanan
2012-12-12
Michael Martin
2012-12-06
Felix Lu
2012-12-12
Shree Narayanan
2012-12-12
Bill Moffat
2012-12-12
Felix Lu
2012-12-06
Morrison, Richard H., Jr.
2012-12-12
Shree Narayanan
2012-12-12
MCNIE Mark
2012-12-07
basar bolukbas
2012-12-07
Shree Narayanan
2012-12-10
basar bolukbas
2012-12-12
Shree Narayanan
2012-12-07
Brian Stahl
2012-12-12
Shree Narayanan
2012-12-12
Brian Stahl
2012-12-11
Fei Wang
2012-12-12
Shree Narayanan
2012-12-12
Wangfei
2012-12-12
sangeeth kallatt
2012-12-07
Tang Tian
2012-12-12
Dave Roberts
2012-12-13
Xiaoguang Liu
Adhesive to bond onto a carrier wafer for etching
Shree Narayanan
2012-12-12
Thanks for the information:). I didnt try thermal release tape that you
mentioned but I did try thermal grease itself. I had local heating effects
which seemed to etch the photoresist away quickly. The problem I believe is
that I am trying to etch down to more than 200u. I might be using
metal/oxide mask to get around this entire issue.

Shree


On Sat, Dec 8, 2012 at 3:23 AM, basar bolukbas wrote:

>
> Dear Shree
> We purchased this thermal bands from Japaniese SAMCO Company.They also buy
> from another company but never talk about its name. :)I think this is
> something industry secret. :)I also couldn't found on the google.SAMCO has
> got good etching system and we use this band during its porcesses.I am sure
> that when you contact with SAMCO, they will also sell to you.If you buy
> non-performed bands, it will be very cheap.Appx. 1 piece of A4 is like 100$
> etc...It is pink...And that is all i know.. :)
> Regards.
> PS: By the way i just check Nitto-Denko's page.It seems that they have got
> a lot of different bands for Semi Conductor Industry.I am sure that our
> band is very similiar with Nitto's bands. It can be Nitto's band also. :)
> ---
>
> > From: snsnair@vt.edu
> > Date: Fri, 7 Dec 2012 10:50:28 -0500
> > To: mems-talk@memsnet.org
> > Subject: Re: [mems-talk] Adhesive to bond onto a carrier wafer for
> etching
> >
> > Dear Mr. Bolukbas,
> >
> > Appreciate your response. Can you point me to a thermal band that you
> have
> > used. I googled up the term and couldnt come up with anything
> intelligent.
> > I have heard about this kind of tape form Nitto-Denko but I am wondering
> if
> > you are aware of a more easily sourced tape.
> >
> > Thanks
> > Shree
> >
> >
> >
> > On Fri, Dec 7, 2012 at 1:38 AM, basar bolukbas <
> basarbolukbas@hotmail.com>wrote:
> >
> > >
> > > Dear Shree
> > >
> > > You can also try thermal band. It has got two similar side with a
> adhesion
> > > future. First you put it on your carrier. Then you remove protective
> > > coating on front side, so now you can put/stick your wafer on it. It
> has
> > > got very good thermal conductivity. As it will be smaller than your
> wafer,
> > > it will not react with your plasma, and you will not have a
> micromasking or
> > > contamination problem. After your etching process, put your carrier
> with
> > > your wafer on a hotplate @ 80C for a minute. Than you can easily remove
> > > your wafer from carrier. No residues no cleaning problems. :)
> > >
> > > Regards.
> > >
> > > > From: snsnair@vt.edu
> > > > Date: Wed, 5 Dec 2012 10:36:21 -0500
> > > > To: mems-talk@memsnet.org
> > > > Subject: [mems-talk] Adhesive to bond onto a carrier wafer for
> etching
> > > >
> > > > Hello all,
> > > >
> > > > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer,
> in
> > > > order to etch it in a Alcatel deep-reactive ion etcher. I am
> wondering if
> > > > someone has used thermal vacuum grease for this purpose that can be
> > > removed
> > > > easily at the end. The silicon wafer is patterned with photoresist
> and
> > > has
> > > > no other material on it.
> > > >
> > > > Thanks
> > > > Shree
> > > > _______________________________________________
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> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
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