Hi Shree, You meant something like Fomblin oil? 1 or 2 drops on your carrier, smear out nicely, would do the chucking perfectly. Can also easily remove (slide) your wafer out of your carrier wafer after DRIE. BUT, you may have a little trouble in cleaning our wafer afterwards. Prime Wafers Rotterdam, NL -----Original Message----- From: mems-talk-bounces+t.li=primewafers.com@memsnet.org [mailto:mems-talk-bounces+t.li=primewafers.com@memsnet.org] On Behalf Of Shree Narayanan Sent: Wednesday, December 05, 2012 4:36 PM To: General MEMS discussion Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching Hello all, I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if someone has used thermal vacuum grease for this purpose that can be removed easily at the end. The silicon wafer is patterned with photoresist and has no other material on it. Thanks Shree _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk