Dear Mr. Bolukbas,

Appreciate your response. Can you point me to a thermal band that you have
used. I googled up the term and couldnt come up with anything intelligent.
I have heard about this kind of tape form Nitto-Denko but I am wondering if
you are aware of a more easily sourced tape.

Thanks
Shree



On Fri, Dec 7, 2012 at 1:38 AM, basar bolukbas wrote:

>
> Dear Shree
>
> You can also try thermal band. It has got two similar side with a adhesion
> future. First you put it on your carrier. Then you remove protective
> coating on front side, so now you can put/stick your wafer on it. It has
> got very good thermal conductivity. As it will be smaller than your wafer,
> it will not react with your plasma, and you will not have a micromasking or
> contamination problem. After your etching process, put your carrier with
> your wafer on a hotplate @ 80C for a minute. Than you can easily remove
> your wafer from carrier. No residues no cleaning problems. :)
>
> Regards.
>
> > From: snsnair@vt.edu
> > Date: Wed, 5 Dec 2012 10:36:21 -0500
> > To: mems-talk@memsnet.org
> > Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching
> >
> > Hello all,
> >
> > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> > order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> > someone has used thermal vacuum grease for this purpose that can be
> removed
> > easily at the end. The silicon wafer is patterned with photoresist and
> has
> > no other material on it.
> >
> > Thanks
> > Shree
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