durusmail: mems-talk: Adhesive to bond onto a carrier wafer for etching
Adhesive to bond onto a carrier wafer for etching
2012-12-05
Shree Narayanan
2012-12-05
Tinka Li
2012-12-06
Michael Martin
2012-12-12
Shree Narayanan
2012-12-12
Michael Martin
2012-12-06
Felix Lu
2012-12-12
Shree Narayanan
2012-12-12
Bill Moffat
2012-12-12
Felix Lu
2012-12-06
Morrison, Richard H., Jr.
2012-12-12
Shree Narayanan
2012-12-12
MCNIE Mark
2012-12-07
basar bolukbas
2012-12-07
Shree Narayanan
2012-12-10
basar bolukbas
2012-12-12
Shree Narayanan
2012-12-07
Brian Stahl
2012-12-12
Shree Narayanan
2012-12-12
Brian Stahl
2012-12-11
Fei Wang
2012-12-12
Shree Narayanan
2012-12-12
Wangfei
2012-12-12
sangeeth kallatt
2012-12-07
Tang Tian
2012-12-12
Dave Roberts
2012-12-13
Xiaoguang Liu
Adhesive to bond onto a carrier wafer for etching
basar bolukbas
2012-12-10
Dear Shree
We purchased this thermal bands from Japaniese SAMCO Company.They also buy from
another company but never talk about its name. :)I think this is something
industry secret. :)I also couldn't found on the google.SAMCO has got good
etching system and we use this band during its porcesses.I am sure that when you
contact with SAMCO, they will also sell to you.If you buy non-performed bands,
it will be very cheap.Appx. 1 piece of A4 is like 100$ etc...It is pink...And
that is all i know.. :)
Regards.
PS: By the way i just check Nitto-Denko's page.It seems that they have got a lot
of different bands for Semi Conductor Industry.I am sure that our band is very
similiar with Nitto's bands. It can be Nitto's band also. :)
---

> From: snsnair@vt.edu
> Date: Fri, 7 Dec 2012 10:50:28 -0500
> To: mems-talk@memsnet.org
> Subject: Re: [mems-talk] Adhesive to bond onto a carrier wafer for etching
>
> Dear Mr. Bolukbas,
>
> Appreciate your response. Can you point me to a thermal band that you have
> used. I googled up the term and couldnt come up with anything intelligent.
> I have heard about this kind of tape form Nitto-Denko but I am wondering if
> you are aware of a more easily sourced tape.
>
> Thanks
> Shree
>
>
>
> On Fri, Dec 7, 2012 at 1:38 AM, basar bolukbas
wrote:
>
> >
> > Dear Shree
> >
> > You can also try thermal band. It has got two similar side with a adhesion
> > future. First you put it on your carrier. Then you remove protective
> > coating on front side, so now you can put/stick your wafer on it. It has
> > got very good thermal conductivity. As it will be smaller than your wafer,
> > it will not react with your plasma, and you will not have a micromasking or
> > contamination problem. After your etching process, put your carrier with
> > your wafer on a hotplate @ 80C for a minute. Than you can easily remove
> > your wafer from carrier. No residues no cleaning problems. :)
> >
> > Regards.
> >
> > > From: snsnair@vt.edu
> > > Date: Wed, 5 Dec 2012 10:36:21 -0500
> > > To: mems-talk@memsnet.org
> > > Subject: [mems-talk] Adhesive to bond onto a carrier wafer for etching
> > >
> > > Hello all,
> > >
> > > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> > > order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> > > someone has used thermal vacuum grease for this purpose that can be
> > removed
> > > easily at the end. The silicon wafer is patterned with photoresist and
> > has
> > > no other material on it.
> > >
> > > Thanks
> > > Shree
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> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
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