In the nanofab at UCSB we use Santovac 5 diffusion pump oil to attach
pieces to carrier wafers. I've personally used it for ICP-RIE (but it is
also in the SOP for our Bosch process etcher) and it works well and is easy
to clean up. Only the tiniest amount is required.

Best regards,

Brian Stahl

--
Sent from a mobile device.
On Dec 5, 2012 11:13 AM, "Shree Narayanan"  wrote:

> Hello all,
>
> I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> someone has used thermal vacuum grease for this purpose that can be removed
> easily at the end. The silicon wafer is patterned with photoresist and has
> no other material on it.
>
> Thanks
> Shree
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk