HI Shree, Crystal bonding wax applied liberally over the backside of the wafers has worked nicely for me in the past. It dissolves in acetone. You can heat up the bonded wafers after DRIE and slide them apart, then soak them in acetone. Good luck! Felix Lu Applied Quantum Technologies, Inc. On Dec 5, 2012, at 10:36 AM, Shree Narayanan wrote: > Hello all, > > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in > order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if > someone has used thermal vacuum grease for this purpose that can be removed > easily at the end. The silicon wafer is patterned with photoresist and has > no other material on it. > > Thanks > Shree > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk ---------------------------- Felix Lu felix_lu@yahoo.com _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk